Chemical and thermal stability of fluorinated amorphous carbon films for interlayer dielectric applications

被引：0

作者：

Chang, J.P. ^{[1
]}

Krautter, H.W. ^{[1
]}

Zhu, W. ^{[1
]}

Opila, R.L. ^{[1
]}

Pai, C.S. ^{[1
]}

机构：

[1] Bell Labs, Lucent Technologies, Murray Hill, NJ 07974, United States

来源：

Materials Research Society Symposium - Proceedings | 1999年 / 565卷

关键词：

D O I：

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中图分类号：

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摘要：

引用

页码：117 / 122

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[1] Chemical and thermal stability of fluorinated amorphous carbon films for interlayer dielectric applications
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