Reaction of ozone and H2O2 in NH4OH solutions and their reaction with silicon wafers

被引：0
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作者：
Eom, Dae-Hong [1 ]
Lim, Geun-Bae [2 ]
Park, Jin-Goo [1 ]
Busnaina, Ahmed A. [3 ]
机构：
[1] Dept. of Metallurgy Engineering, Ctr. for Electron. Mat./Components, Hanyang University, Ansan, 425-791, Korea, Republic of
[2] Pohang Univ. of Sci. and Technology, Department of Mechanical Engineering, Pohang 790-784, Korea, Republic of
[3] Ctr. for Microcontamination Control, Northeastern University, Boston, MA 02115, United States
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2004年 / 43卷 / 6 A期
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页码：3335 / 3339
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