Effect of boron diffusion on the high-voltage behavior of 6H-SiC p+ nn+ structures

被引:0
|
作者
Ortolland, S.
Raynaud, C.
Chante, J.P.
Locatelli, M.L.
Lebedev, A.A.
Andreev, A.N.
Savkina, N.S.
Chelnokov, V.E.
Rastegaeva, M.G.
Syrkin, A.L.
机构
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Effect of boron diffusion on the high-voltage behavior of 6H-SiC p(+)nn(+) structures
    Ortolland, S
    Raynaud, C
    Chante, JP
    Locatelli, ML
    Lebedev, AA
    Andreev, AN
    Savkina, NS
    Chelnokov, VE
    Rastegaeva, MG
    Syrkin, AL
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (09) : 5464 - 5468
  • [2] High voltage P+ polysilicon/N- 6H-SiC heterojunction diodes
    Shenoy, PM
    Baliga, BJ
    ELECTRONICS LETTERS, 1997, 33 (12) : 1086 - 1087
  • [3] HIGH-VOLTAGE 6H-SIC P-N-JUNCTION DIODES
    MATUS, LG
    POWELL, JA
    SALUPO, CS
    APPLIED PHYSICS LETTERS, 1991, 59 (14) : 1770 - 1772
  • [4] HIGH-VOLTAGE 6H-SIC RECTIFIERS - PROSPECTS AND PROGRESS
    NEUDECK, PG
    LARKIN, DJ
    POWELL, JA
    MATUS, LG
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (11) : 2130 - 2130
  • [5] Shunting patterns occurring in epitaxial 6H-SiC p-n structures for high-voltage rectifiers
    Strelchuk, AM
    Evstropov, VV
    Rastegaeva, MG
    Kuznetsova, EP
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 46 (1-3): : 231 - 235
  • [6] Investigation of boron diffusion in 6H-SiC
    Gao, Y
    Soloviev, SI
    Sudarshan, TS
    APPLIED PHYSICS LETTERS, 2003, 83 (05) : 905 - 907
  • [7] Selective doping of 6H-SiC by diffusion of boron
    Soloviev, S.
    Gao, Y.
    Khlebnikov, I.I.
    Sudarshan, T.S.
    Materials Science Forum, 2000, 338
  • [8] Doping of 6H-SiC by selective diffusion of boron
    Soloviev, SI
    Gao, Y
    Sudarshan, TS
    APPLIED PHYSICS LETTERS, 2000, 77 (24) : 4004 - 4006
  • [9] Selective doping of 6H-SiC by diffusion of boron
    Soloviev, S
    Gao, Y
    Khlebnikov, II
    Sudarshan, TS
    SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2, 2000, 338-3 : 945 - 948
  • [10] P-type 4H and 6H-SiC high-voltage Schottky barrier diodes
    Raghunathan, R
    Baliga, BJ
    IEEE ELECTRON DEVICE LETTERS, 1998, 19 (03) : 71 - 73