Pulsed laser deposition of carbon nitride thin films from graphite targets

被引：0
|
作者：
Suda, Y.
Nakazono, T.
Ebihara, K.
Baba, K.
Aoqui, S.
机构：
[1] Department of Electrical Engineering, Sasebo Natl. College of Technology, 1-1 Okishin-machi, Sasebo, Nagasaki 857-11, Japan
[2] Dept. of Elec. Eng. and Comp. Sci., Kumamoto University, 2-39-1 Kurokami, Kumamoto 860, Japan
[3] Technology Center of Nagasaki, 2-1303-8 Ikeda, Omura, Nagasaki 856, Japan
[4] Kumamoto Institute of Technology, Ikeda, Kumamoto 860, Japan
来源：
Carbon | / 36卷 / 5-6期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：771 / 774
相关论文
共 50 条
  • [1] Pulsed laser deposition of carbon nitride thin films from graphite targets
    Suda, Y
    Nakazono, T
    Ebihara, K
    Baba, K
    Aoqui, S
    CARBON, 1998, 36 (5-6) : 771 - 774
  • [2] Pulsed laser deposition of carbon nitride thin films from graphite targets
    Suda, Y
    Nakazono, T
    Ebihara, K
    Baba, K
    Aoqui, S
    FULLERENES AND CARBON BASED MATERIALS, 1998, 68 : 771 - 774
  • [3] Pulsed laser deposition and physical properties of carbon nitride thin films
    Zhang, ZJ
    Fan, SS
    Huang, JL
    Lieber, CM
    JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (01) : 57 - 61
  • [4] Pulsed laser deposition of tetrahedral amorphous carbon films from glassy carbon and graphite targets: a comparative study
    Orlianges, JC
    Champeaux, C
    Catherinot, A
    Merle, T
    Angleraud, B
    THIN SOLID FILMS, 2004, 453 : 285 - 290
  • [5] Pulsed laser deposition of amorphous carbon nitride thin films and their electrical properties
    Y. Aoi
    K. Sakurada
    E. Kamijo
    Applied Physics A, 2004, 79 : 1533 - 1536
  • [6] Pulsed laser deposition of carbon nitride thin films in nitrogen gas ambient
    Okoshi, M
    Kumagai, H
    Toyoda, K
    JOURNAL OF MATERIALS RESEARCH, 1997, 12 (12) : 3376 - 3379
  • [7] Pulsed laser deposition of carbon nitride thin films in nitrogen gas ambient
    Masayuki Okoshi
    Hiroshi Kumagai
    Koichi Toyoda
    Journal of Materials Research, 1997, 12 : 3376 - 3379
  • [8] The characterization of carbon nitride alloy thin films deposited by pulsed laser deposition
    Rusop, M
    Tian, XM
    Soga, T
    Jimbo, T
    Umeno, M
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2002, 386 : 89 - 96
  • [9] Pulsed laser deposition of amorphous carbon nitride thin films and their electrical properties
    Aoi, Y
    Sakurada, K
    Kamijo, E
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 1533 - 1536
  • [10] Carbon nitride thin films prepared by nitrogen ion assisted pulsed laser deposition of graphite using KrF excimer laser
    Yamamoto, K
    Koga, Y
    Fujiwara, S
    Kokai, F
    Kleiman, JI
    Kim, KK
    THIN SOLID FILMS, 1999, 339 (1-2) : 38 - 43
12345