Process technologies for three-dimensional optoelectronic integrated circuits

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作者：
Katayama, Yoshifumi [1 ]
机构：
[1] Optoelectronics Technology Research, Lab (OTL), Tsukuba, Japan
来源：
Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi) | 1993年 / 76卷 / 02期
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32;
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页码：14 / 22
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