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Vacuum Turbomolecular Pumps.
被引：0
作者：
Szpringier, Jacek
机构：
来源：
Elektronika Warszawa
|
1981年
/
22卷
/
7-8期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The operating principles and construction of modern turbomolecular pumps have been described. Basic technical data and characteristics of the TURBOVAC series of turbomolecular pumps as well as examples of their applications have been presented.
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页码：18 / 22
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