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AlN thin film deposition by pulsed laser ablation of Al in NH3
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Universita `La Sapienza', Rome, Italy
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Thin Solid Films
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1-2卷
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77-82期
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The authors are grateful to Dr V. Marotta and Dr A. San-tagata for help in preparing thin films;
and to Dr T. Dikonimos Makris for EDAX analyses. Useful discussions with Prof. R. Kelly and Prof. M. Valigi are also acknowledged. Acknowledgements for financial support are due to CNR;
Progetto Strategico 'Materiali Innovativi';
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