Fabrication of a new electrostatic linear actuator

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作者：
Matsunaga, Takashi [1 ]
Kondoh, Kazuya [1 ]
Kumagae, Michihiro [1 ]
Kawata, Hiroaki [1 ]
Yasuda, Masaaki [1 ]
Murata, Kenji [1 ]
Yoshitake, Masaaki [1 ]
机构：
[1] Osaka Prefecture Univ, Osaka, Japan
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| 1600年 / 39期
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