In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide

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[1] Zudans, I.
[2] Seliskar, C.J.
[3] Heineman, W.R.
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Seliskar, C.J. (Carl.Seliskar@uc.edu) | 1600年 / Elsevier卷 / 426期
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Thin films
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