Role of surface instability and anisotropy in strain relaxation of epitaxial SiGe on Si(110)

被引:0
|
作者
Deng, X.
Krishnamurthy, M.
机构
来源
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Role of surface instability and anisotropy in strain relaxation of epitaxial SiGe on Si(110)
    Deng, X
    Krishnamurthy, M
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (11) : 7689 - 7693
  • [2] Role of surface instability and anisotropy on strain relaxation of SiGe on Si(110)
    Deng, X
    Krishnamurthy, M
    EPITAXY AND APPLICATIONS OF SI-BASED HETEROSTRUCTURES, 1998, 533 : 215 - 220
  • [3] Anisotropy of strain relaxation in (100) and (110) Si/SiGe heterostructures
    Trinkaus, H.
    Buca, D.
    Minamisawa, R. A.
    Hollaender, B.
    Luysberg, M.
    Mantl, S.
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (01)
  • [4] Strain relaxation of epitaxial SiGe layers on Si(100) improved by hydrogen implantation
    Mantl, S.
    Hollaender, B.
    Liedtke, R.
    Mesters, S.
    Herzog, H.J.
    Kibbel, H.
    Hackbarth, T.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1999, 147 (1-4): : 29 - 34
  • [5] Strain relaxation of epitaxial SiGe layers on Si(100) improved by hydrogen implantation
    Mantl, S
    Holländer, B
    Liedtke, R
    Mesters, S
    Herzog, HJ
    Kibbel, H
    Hackbarth, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 147 (1-4): : 29 - 34
  • [6] Strain relaxation by pit formation in epitaxial SiGe alloy films grown on Si(001)
    1600, American Inst of Physics, Woodbury, NY, USA (88):
  • [7] Strain relaxation of epitaxial SiGe layer and Ge diffusion during Ni silicidation on cap-Si/SiGe/Si(001)
    Jang, C. H.
    Sardela, M. R., Jr.
    Kim, S. -H
    Song, Y. -J
    Lee, N. -E
    APPLIED SURFACE SCIENCE, 2006, 252 (15) : 5326 - 5330
  • [8] Strain relaxation by pit formation in epitaxial SiGe alloy films grown on Si(001)
    Di Gaspare, L
    Palange, E
    Capellini, G
    Evangelisti, F
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (01) : 120 - 123
  • [9] Kinetics of epitaxial growth of Si and SiGe films on (110)Si substrates
    Sugiyama, N
    Moriyama, Y
    Nakaharai, S
    Tezuka, T
    Mizuno, T
    Takagi, S
    APPLIED SURFACE SCIENCE, 2004, 224 (1-4) : 188 - 192
  • [10] Strain relaxation of SiGe in a Si/SiGe/Si heterostructure under proton irradiation
    Di, Z. F.
    Wang, Y. Q.
    Nastasi, M.
    Bisognin, G.
    Berti, M.
    Thompson, P. E.
    APPLIED PHYSICS LETTERS, 2009, 94 (26)