HIGH PERFORMANCE VLSI PHOTOMASK WITH A MOLYBDENUM SILICIDE FILM.

被引：0
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作者：
Watakabe, Yaichiro [1 ]
Kato, Tadao [1 ]
机构：
[1] Mitsubishi Electric Corp, Tokyo, Jpn, Mitsubishi Electric Corp, Tokyo, Jpn
来源：
Mitsubishi Electric Advance | 1986年 / 36卷
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摘要：
5
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页码：23 / 25
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