Design and adjustment of a 100 J level KrF excimer laser

被引：0
|
作者：
Shan, Yusheng [1 ]
Wang, Naiyan [1 ]
Zeng, Naigong [1 ]
Zhou, Chuangzhi [1 ]
机构：
[1] China Inst of Atomic Energy, Beijing, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 1993年 / 5卷 / 01期
关键词：
Excimer lasers;
D O I：
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学科分类号：
摘要：
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页码：5 / 15
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