Modes of propagating light waves in thin films of boron nitride deposited by plasma enhanced chemical vapor deposition

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作者
Boudiombo, J. [1 ]
Baehr, O. [1 ]
Boudrioua, A. [1 ]
Thevenin, P. [1 ]
Loulergue, J.C. [1 ]
Bath, A. [1 ]
机构
[1] Universite de Metz et Supelec, Metz, France
来源
Materials science & engineering. B, Solid-state materials for advanced technology | 1997年 / B46卷 / 1-3期
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13
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页码:96 / 98
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