共 50 条
- [33] Hydrogen passivation of polycrystalline silicon thin films Journal of Applied Physics, 2012, 112 (06):
- [34] Observation on defects in polycrystalline silicon thin films Hu, Y.F., 2005, Chinese Academy of Sciences (18):
- [36] Polycrystalline Silicon Thin Films for Flow Measurement AFRICAN REVIEW OF PHYSICS, 2007, 1 : 21 - 23
- [37] Optical characterization of polycrystalline silicon thin films METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY X, 1996, 2725 : 450 - 459
- [39] Growth and texture of polycrystalline thin films POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II, 1996, 403 : 39 - 44
- [40] Highly ⟨100⟩ -oriented growth of polycrystalline silicon films on glass by pulsed magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (06): : 2004 - 2006