共 50 条
- [26] Growth Kinetics and Properties of Thin Highly Doped Polycrystalline Silicon Films. Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy, 1977, 13 (06): : 941 - 945
- [27] Growth and physical properties of in situ phosphorusdoped RTLPCVD polycrystalline silicon thin films Materials Science in Semiconductor Processing, 1998, 1 (3-4): : 299 - 302
- [28] Growth behavior of polycrystalline silicon thin films deposited by RTCVD on quartz substrates CHINESE SCIENCE BULLETIN, 2010, 55 (19): : 2057 - 2062