The surface composition of implanted SUS304 and Fe at high temperature was observed in a vacuum with AES and XPS. The precipitation of Ti compounds was found on the surface of implanted SUS304 and Fe. Ti+ implanted into SUS304 and Fe, which existed near the surfaces of metals, diffused into the bulk and reacted on C and N in metals. At about 600K, TiC precipitated on the surfaces of both SUS304 and Fe. The precipitated TiC disappeared at about 1100K and TiN precipitated on the surfaces of SUS304, while on the surface of Fe this change was observed at about 750K.