THIN FILM THICKNESS MEASUREMENTS.

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作者：
Flood, Per R.
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来源：
Scanning Electron Microscopy | 1980年
关键词：
MICROSCOPIC EXAMINATION - Specimen Preparation;
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摘要：
The thickness of metal films as deposited on non-conductive SEM specimens may be determined in many direct or indirect ways based on a variety of physical principles more or less firmly related to the film thickness. Advantages and disadvantages of the different methods and their accuracy are discussed in relation to film under formation and growth upto a thickness of about 30 nm. Refs.
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页码：183 / 200
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