Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

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[1] Yuasa, Motokazu

[2] Kawarada, Hiroshi

[3] Wei, Jin

[4] Ma, Jing Sheng

[5] Suzuki, Jun-ichi

[6] Okada, Sigenobu

[7] Hiraki, Akio

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Yuasa, Motokazu | 1600年 / 49期

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[24] TAILORING SP2/SP3 RATIO IN DIAMOND-LIKE CARBON FILMS VIA DEPOSITION PARAMETERS IN A HIGH VOLTAGE ANODIC VACUUM PLASMA [J].

Badulescu, M. ;

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ROMANIAN REPORTS IN PHYSICS, 2019, 71 (04)

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