Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

被引：0

作者：

机构：

[1] Yuasa, Motokazu

[2] Kawarada, Hiroshi

[3] Wei, Jin

[4] Ma, Jing Sheng

[5] Suzuki, Jun-ichi

[6] Okada, Sigenobu

[7] Hiraki, Akio

来源：

Yuasa, Motokazu | 1600年 / 49期

关键词：

Coatings;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1 / 3

共 50 条

[11] TiO2 thin films formed by electron cyclotron resonance plasma oxidation at high temperature and their application to capacitor dielectrics
Abe, Yoshio
Fukuda, Takuya
Japanese Journal of Applied Physics, Part 2: Letters, 1994, 33 (9 A):
[12] Effect of a microwave plasma with electron cyclotron resonance on the electrophysical properties of diamond-like carbon films
Tech Phys Lett, 3 (245):
[13] Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma
Zarrabian, M
FourchesCoulon, N
Turban, G
Marhic, C
Lancin, M
APPLIED PHYSICS LETTERS, 1997, 70 (19) : 2535 - 2537
[14] ELECTRICAL-CONDUCTIVITY STUDIES OF DIAMOND FILMS PREPARED BY ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA
JIN, S
MOUSTAKAS, TD
APPLIED PHYSICS LETTERS, 1993, 63 (17) : 2354 - 2356
[15] ELECTRON-CYCLOTRON RESONANCE DEPOSITION OF DIAMOND-LIKE FILMS
SHING, YH
POOL, FS
VACUUM, 1990, 41 (4-6) : 1368 - 1370
[16] Helium-charged titanium films deposited by pulsed laser deposition in an electron-cyclotron-resonance helium plasma environment
Jin, QH
Hu, PG
Ling, H
Wu, JD
Shi, LQ
Zhou, ZY
CHINESE PHYSICS LETTERS, 2003, 20 (03) : 386 - 388
[17] Ion current density and ion energy distributions at the electron cyclotron resonance position in the electron cyclotron resonance plasma
Samukawa, Seiji, 1600, (30):
[18] A WSixN diffusion barrier formed with electron cyclotron resonance nitrogen plasma
Hirata, A
Hosoya, T
Machida, K
Takaoka, H
Akiya, H
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (11) : 3747 - 3751
[19] ETCHED PROFILE DISTORTIONS IN HIGH-DENSITY ELECTRON-CYCLOTRON-RESONANCE PLASMA
YONEDA, M
MARUYAMA, T
FUJIWARA, N
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3363 - 3368
[20] Numerical study on uniformity of electron cyclotron resonance plasma density
Gao Bi-Rong
Liu Yue
ACTA PHYSICA SINICA, 2011, 60 (04)

← 1 2 3 4 5 →