Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

被引：0
作者：
机构：
[1] Yuasa, Motokazu
[2] Kawarada, Hiroshi
[3] Wei, Jin
[4] Ma, Jing Sheng
[5] Suzuki, Jun-ichi
[6] Okada, Sigenobu
[7] Hiraki, Akio
来源：
Yuasa, Motokazu | 1600年 / 49期
关键词：
Coatings;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1 / 3
相关论文
共 24 条
[1]   Control of composition and crystallinity in hydroxyapatite films deposited by electron cyclotron resonance plasma sputtering [J].
Akazawa, Housei ;
Ueno, Yuko .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2014, 75 (01) :94-99
[2]   Investigation on Bioactivity of Titanium Dioxide Thin Films Fabricated by Electron Cyclotron Resonance Plasma Aided Pulsed Laser Deposition [J].
Shu Qiwei ;
Zhong Xiaoxia ;
Wu Jiada ;
Sun Jian ;
Ostrikov, Kostya .
PLASMA SCIENCE & TECHNOLOGY, 2009, 11 (04) :477-480
[3]   Integrated characterization study of diamond like carbon (DLC) synthesized by 2.45 GHZ microwave electron cyclotron resonance (ECR) plasma CVD [J].
Dey, R. M. ;
Patil, D. ;
Kulkarni, S. .
SURFACE & COATINGS TECHNOLOGY, 2017, 328 :30-43
[4]   Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System [J].
Zhang, Guangan ;
Wang, Liping ;
Yan, Pengxun ;
Zhang, Junyan .
ADVANCED TRIBOLOGY, 2009, :816-819
[5]   Design of Electron Cyclotron Resonance Heating protection components for first plasma operations in ITER [J].
Moro, Alessandro ;
Bruschi, Alessandro ;
Darcourt, Olivier ;
Fanale, Francesco ;
Farina, Daniela ;
Figini, Lorenzo ;
Gandini, Franco ;
Henderson, Mark ;
Hunt, Ryan ;
Lechte, Carsten ;
Platania, Paola ;
Plaum, Burkhard .
FUSION ENGINEERING AND DESIGN, 2020, 154
[6]   Highly adhesive Pt-electrode films directly deposited on SiO2 by electron-cyclotron-resonance plasma sputtering [J].
Akazawa, Housei .
SURFACE & COATINGS TECHNOLOGY, 2010, 204 (11) :1836-1841
[7]   Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition [J].
Lin, Sixu ;
Xie, Dong ;
Tang, Yongliang ;
Wang, Yiwen ;
Jing, Fengjuan ;
Huang, Nan ;
Leng, Yongxiang .
VACUUM, 2021, 189
[8]   Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films [J].
Xiong Yuqing ;
Sang Lijun ;
Chen Qiang ;
Yang Lizhen ;
Wang Zhengduo ;
Liu Zhongwei .
PLASMA SCIENCE & TECHNOLOGY, 2013, 15 (01) :52-55
[9]   Fabrication of high density, adherent films of five-fold symmetric diamond crystals by hot filament chemical vapour deposition [J].
Wei, Qiuping ;
Ashfold, M. N. R. ;
Yu, Z. M. ;
Ma, Li ;
Yin, D. F. .
JOURNAL OF CRYSTAL GROWTH, 2011, 336 (01) :72-76
[10]   Enhancement of octacalcium phosphate deposition on a titanium surface activated by electron cyclotron resonance plasma oxidation [J].
Orii, Yusuke ;
Masumoto, Hiroshi ;
Honda, Yoshitomo ;
Anada, Takahisa ;
Goto, Takashi ;
Sasaki, Keiichi ;
Suzuki, Osamu .
JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART B-APPLIED BIOMATERIALS, 2010, 93B (02) :476-483
123