Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

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[1] Yuasa, Motokazu
[2] Kawarada, Hiroshi
[3] Wei, Jin
[4] Ma, Jing Sheng
[5] Suzuki, Jun-ichi
[6] Okada, Sigenobu
[7] Hiraki, Akio
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Yuasa, Motokazu | 1600年 / 49期
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