SEM STUDY OF THERMAL DEGRADATION OF INDIUM PHOSPHIDE SUBSTRATES.

被引：0

作者：

Shrivastava, M.C. ^{[1
]}

Swaminathan, S. ^{[1
]}

机构：

[1] Univ of Roorkee, Roorkee, India, Univ of Roorkee, Roorkee, India

来源：

Microelectronics Journal | 1988年 / 19卷 / 01期

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摘要：

SEM observations are reported with the aim of studying the thermal degradation of InP substrate surfaces decomposed at typical VPE and LPE growth temperatures in a hydrogen atmosphere. The surface morphology is shown to vary extensively with the variation of annealing temperature.

引用

页码：48 / 51