Pulsed-jet epitaxy of III-V compounds

被引:0
|
作者
Ozeki, Masashi [1 ]
Ohtsuka, Nobuyuki [1 ]
Sakuma, Yoshiki [1 ]
机构
[1] Fujitsu Lab, Atsugi, Japan
来源
Fujitsu Scientific and Technical Journal | 1992年 / 28卷 / 01期
关键词
Pulsed Jet Epitaxy (PJE);
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:50 / 61
相关论文
共 50 条
  • [1] PULSED-JET EPITAXY OF III-V COMPOUNDS
    OZEKI, M
    OHTSUKA, N
    SAKUMA, Y
    FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1992, 28 (01): : 50 - 61
  • [2] PULSED JET EPITAXY OF III-V COMPOUNDS
    OZEKI, M
    OHTSUKA, N
    SAKUMA, Y
    KODAMA, K
    JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) : 102 - 110
  • [3] PULSED-JET EPITAXY - APPLICATION TO DEVICE PROCESSES
    SAKUMA, Y
    OZEKI, M
    OHTSUKA, N
    MATSUMIYA, Y
    SHIGEMATSU, H
    UEDA, O
    MUTO, S
    NAKAJIMA, K
    YOKOYAMA, N
    APPLIED SURFACE SCIENCE, 1994, 82-3 (1-4) : 46 - 56
  • [4] SELECTIVE GROWTH OF GAAS BY PULSED-JET EPITAXY
    SAKUMA, Y
    MUTO, S
    YOKOYAMA, N
    IEICE TRANSACTIONS ON ELECTRONICS, 1994, E77C (09) : 1414 - 1419
  • [5] ATOMIC LAYER EPITAXY OF III-V COMPOUNDS
    TISCHLER, MA
    MCDERMOTT, B
    ELMASRY, N
    BEDAIR, SM
    JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (04) : A8 - A8
  • [6] EPITAXY OF METALLIC COMPOUNDS ON III-V SEMICONDUCTORS
    GUIVARCH, A
    GUERIN, R
    POUDOULEC, A
    CAULET, J
    GUENAIS, B
    BALLINI, Y
    DUPAS, G
    ROPARS, G
    REGRENY, A
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1988, 43 (241): : 187 - 189
  • [7] MOLECULAR STREAM EPITAXY OF III-V COMPOUNDS
    KATSUYAMA, T
    TISCHLER, MA
    HUMPHREYS, TP
    BEDAIR, SM
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (05) : 293 - 293
  • [8] LASER ASSISTED EPITAXY OF III-V COMPOUNDS
    BEDAIR, SM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C432 - C432
  • [9] MOLECULAR-BEAM EPITAXY OF III-V COMPOUNDS
    KUNZEL, H
    PHYSICA B & C, 1985, 129 (1-3): : 66 - 80
  • [10] ATOMIC LAYER EPITAXY OF III-V BINARY COMPOUNDS
    BEDAIR, SM
    TISCHLER, MA
    KATSUYAMA, T
    ELMASRY, NA
    APPLIED PHYSICS LETTERS, 1985, 47 (01) : 51 - 53