Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection

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作者
Miller, J.Michael [1 ]
de Beaucoudrey, Nicole [1 ]
Chavel, Pierre [1 ]
Turunen, Jari [1 ]
Cambril, Edmond [1 ]
机构
[1] Cent Natl de la Recherche, Scientifique, Orsay, France
来源
Applied Optics | 1997年 / 36卷 / 22期
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页码:5717 / 5727
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