Sol-gel growth of high-quality Pb(Zr,Ti)O3 films on RUO2 using seed layers

被引:0
作者
Norga, G.J. [1 ]
Fè, Laura [1 ]
Wouters, D.J. [1 ]
Bartic, A. [1 ]
Maes, H.E. [1 ]
机构
[1] IMEC Vzw, Kapeldreef 75, Leuven, Belgium
来源
Materials Research Society Symposium - Proceedings | 1999年 / 541卷
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摘要
21
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页码:307 / 312
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