Measurement of the electron energy distribution in asymmetric radio-frequency plasmas with a self-compensating Langmuir probe

被引：0
作者：
Osaka Prefecture Univ, Osaka, Japan [1 ]
机构：
来源：
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 7 B卷 / 4601-4604期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Kinetic investigation of the ion angular distribution in capacitive radio-frequency plasmas
    Shihab, Mohammed
    Mussenbrock, Thomas
    PHYSICS OF PLASMAS, 2017, 24 (11)
  • [32] ON THE RADIO-FREQUENCY REQUIREMENTS OF HIGH ENERGY ELECTRON SYNCHROTRONS
    KAISER, TR
    PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1951, 64 (378): : 502 - 507
  • [33] An investigation on optical properties of capacitive coupled radio-frequency mixture plasma with Langmuir probe
    Tanisli, M.
    Sahin, N.
    Demir, S.
    OPTIK, 2017, 142 : 153 - 162
  • [34] LANGMUIR PROBE MEASUREMENT OF ELECTRON-TEMPERATURE IN HIGH-PRESSURE PLASMAS
    CLEMENTS, RM
    SMY, PR
    JOURNAL OF APPLIED PHYSICS, 1973, 44 (08) : 3550 - 3556
  • [35] Langmuir probe characterization of low-frequency oscillations in a radio-frequency SF6 plasma
    Barlow, A. J.
    Deslandes, A.
    Quinton, J. S.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (06)
  • [36] Modeling a radio-frequency single-electron-transistor scanning probe
    Lu, Li
    Su, Lina
    Sun, Jiandong
    Li, Xinxing
    Qin, Hua
    Ji, Zhongqing
    Blick, Robert H.
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (08)
  • [37] A novel system for the direct measurement of the electron energy distribution function by Langmuir probe in ion sources
    Homfray, D.
    Crowley, B.
    FUSION ENGINEERING AND DESIGN, 2007, 82 (5-14) : 829 - 835
  • [38] Field probe for low-pressure capacitively coupled radio-frequency discharge plasmas
    Dyson, A
    Allen, JE
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2003, 14 (01) : 107 - 113
  • [39] Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
    Liu, D. W.
    Iza, F.
    Kong, M. G.
    APPLIED PHYSICS LETTERS, 2008, 93 (26)
  • [40] MEASUREMENTS IN SILANE RADIO-FREQUENCY GLOW-DISCHARGES USING A TUNED AND HEATED LANGMUIR PROBE
    LIN, QX
    LIN, XY
    YU, YP
    WANG, H
    CHEN, JY
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (08) : 4899 - 4902
12345