LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING.

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Tanino, Hiroshi
Hoh, Koichiro
Hirata, Masahiro
Ichimura, Shingo
Atoda, Nobufumi
Tomimasu, Takio
Noguchi, Tsutomu
Sugiyama, Suguru
Yamazaki, Tetsuo
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| 1600年 / 22期
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