LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING.

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作者：

Tanino, Hiroshi

Hoh, Koichiro

Hirata, Masahiro

Ichimura, Shingo

Atoda, Nobufumi

Tomimasu, Takio

Noguchi, Tsutomu

Sugiyama, Suguru

Yamazaki, Tetsuo

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| 1600年 / 22期

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[1] LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON-BEAM IN THE STORAGE RING
TANINO, H
HOH, K
HIRATA, M
ICHIMURA, S
ATODA, N
TOMIMASU, T
NOGUCHI, T
SUGIYAMA, S
YAMAZAKI, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (11): : L677 - L679
[2] STATIONARY LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING A NEW ARRANGEMENT OF MAGNETS APPLIED TO THE STORAGE RING
TANINO, H
HOH, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (11): : L718 - L720
[3] PROPOSALS AND EXPERIMENTS ON LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY
TANINO, H
HOH, K
HIRATA, M
ATODA, N
ICHIMURA, S
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 232 - 236
[4] COHERENT SYNCHROTRON RELAXATION OSCILLATION IN AN ELECTRON STORAGE RING.
Rakowsky, G.
IEEE Transactions on Nuclear Science, 1985, NS-32 (05)
[5] PRELIMINARY DESIGN OF A DEDICATED 6 Gev SYNCHROTRON RADIATION STORAGE RING.
Vignola, G.
Nuclear instruments and methods in physics research, 1985, A236 (02): : 414 - 418
[6] LARGE PERMANENT MAGNET QUADRUPOLES FOR AN ELECTRON STORAGE RING.
Herb, S.W.
Nuclear instruments and methods in physics research, 1987, A259 (03): : 358 - 364
[7] COHERENT OPERATION OF SLIDING WIGGLER FOR STATIONARY LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY
TANINO, H
HOH, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (01): : 131 - 131
[8] MICROWAVE RADIATION OF AN ELECTRON BEAM IN A STORAGE RING WITH COHERENT SYNCHROTRON OSCILLATIONS.
Gladkikh, P.I.
Mazmanishvili, A.S.
Mocheshnikov, N.I.
Tarasenko, A.S.
Soviet physics. Technical physics, 1981, 26 (03): : 359 - 362
[9] STUDIES OF POSITIONAL STABILITY OF THE ELECTRON BEAM IN THE NSLS STORAGE RING.
Yu, L.H.
Nawrocky, R.J.
Galayda, J.
IEEE Transactions on Nuclear Science, 1985, NS-32 (05)
[10] SYNCHROTRON RADIATION FROM THE LARGE ELECTRON-POSITRON STORAGE RING LEP
HOFMANN, A
PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 1980, 64 (05): : 253 - 281

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