Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: surface modification for controlled nucleation

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Smith, L.L.
Read, W.W.
Yang, C.S.
Srinivasan, E.
Courtney, C.H.
Lamb, H.H.
Parsons, G.N.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 1998年 / 16卷 / 3 pt 1期
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