Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants

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作者
Synowicki, R.A. [1 ]
机构
[1] J.A. Woollam Co, Inc, Lincoln, United States
来源
Thin Solid Films | 1998年 / 313-314卷 / 1-2期
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页码:394 / 397
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