ELECTRON DENSITY ON THE SURFACE OF A DIELECTRIC INTERACTING WITH A PLASMA.

被引：0
|
作者：
Danilyuk, A.L. [1 ]
Tkharev, E.E. [1 ]
机构：
[1] Minsk Radiotechnical Inst, Minsk, USSR, Minsk Radiotechnical Inst, Minsk, USSR
来源：
Journal of Engineering Physics (English Translation of Inzhenerno-Fizicheskii Zhurnal) | 1985年 / 48卷 / 02期
关键词：
CONTACT PLASMA DIAGNOSTICS - DENSITY FUNCTIONAL METHOD - ELECTRON DENSITY - MICROELECTRONICS - PLASMA CHEMISTRY;
D O I：
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学科分类号：
摘要：
(Edited Abstract)
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页码：210 / 214
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