Micromachined GaAs/AlGaAs Resonant-Cavity Light Emitter with Small Temperature Dependence of Emission Wavelength

被引：0

作者：

机构：

[1] Amano, Takeru

[2] Koyama, Fumio

[3] Arai, Masakazu

[4] Matsutani, Akihiro

来源：

Amano, T. (takeru33@ms.pi.titech.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 42期

关键词：

Cavity resonators - Light emission - Microelectromechanical devices - Micromachining - Semiconducting aluminum compounds - Semiconducting gallium arsenide - Strain - Thermal stress;

D O I：

暂无

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摘要：

We present the design of novel micromachined vertical-cavity light emitters/lasers with a thermal strain control layer for temperature-insensitive operations. The temperature dependence of a resonant wavelength can be freely controlled in a micromachined cantilever structure. We demonstrated a micromachined resonant-cavity light emitter with a small temperature dependence of the emission wavelength. The temperature dependence was as small as +0.015 nm/K, which is five times smaller than that of conventional single-mode lasers.

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