Measurement of Surface Topography

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作者
Kagami, Jujiro [1 ]
Hatazawa, Tetsuzo [1 ]
Kawaguchi, Takahisa [1 ]
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[1] Dept. of Mech. Systems Engineering, Faculty of Engineering, Utsunomiya University, 2753, Ishii-machi, Utsunomiya-shi, Tochigi 321-8585, Japan
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页码:558 / 565
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