Recent trends and reviews of ultra-precision machine tools

被引:0
作者
Tanaka, Katsutoshi [1 ]
机构
[1] Nano Processing System Division, Toshiba Machine Co., Ltd., Numazu-shi, Shizuoka, 410-8510
来源
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 2009年 / 75卷 / 757期
关键词
Aerostatic bearing; Aspheric lens; Linear motor drive system; Mirror finish; Single-crystal diamond tool; Ultra-precision aspheric generator; Ultra-precision machine tool; V-V roller guide way;
D O I
10.1299/kikaic.75.2369
中图分类号
学科分类号
摘要
[No abstract available]
引用
收藏
页码:2369 / 2378
页数:9
相关论文
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