Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators

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[1] [1,Feng, Duan
[2] Xu, Dehui
[3] Wu, Guoqiang
[4] Xiong, Bin
[5] Wang, Yuelin
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| 1600年 / American Institute of Physics Inc.卷 / 115期
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Finite element method;
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