Sensitivity modification of piezoelectric diaphragm-type ultrasonic microsensors by poling and influence of in-plane Stress

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[1] Yamashita, Kaoru
[2] Tanaka, Hikaru
[3] Morimoto, Atsushi
[4] Yang, Yi
[5] Noda, Minoru
来源：
Yamashita, K. (yamashita.kaoru@kit.ac.jp) | 1600年 / Institute of Electrical Engineers of Japan卷 / 134期
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D O I：
10.1541/ieejsmas.134.119
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