Influence of Ar pressure on microstructures and properties of vanadium carbide coating

被引：0

作者：

Shen J. ^{[1
]}

Li G. ^{[1
]}

Li Y. ^{[1
]}

Li G. ^{[1
]}

机构：

[1] State Key Lab. of Metal Matrix Composites, Shanghai Jiao Tong University

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2011年 / 31卷 / 02期

关键词：

Hard coatings; Magnetron sputtering; Mechanical properties; Microstructure; Vanadium carbide;

D O I：

10.3969/j.issn.1672-7126.2011.02.18

中图分类号：

学科分类号：

摘要：

The vanadium carbide(VC) coatings were deposited by magnetron sputtering of VC ceramic target in different argon pressures on substrates of stainless steel. The impacts of the Ar pressure on VC film growth were studied. The microstructures and mechanical properties of VC coatings were characterized with X-ray diffraction, X-ray energy dispersive spectroscopy, scanning electron microscopy, atomic force microscopy and nanoin dentation. The results show that the Ar pressure strongly affects the microstructures and mechanical properties of VC coating: at low pressure(0.32~0.9 Pa), poor crystallization and low hardness were observed; at a pressure ranging from 2.4 Pa to 3.2 Pa, the well crystallized coatings were obtained with the highest hardness up to 28 GPa; at a pressure higher than 4.0 Pa, the crystallization and hardness deteriorated. Possible mechanisms were also tentatively discussed.

引用

页码：216 / 220

页数：4

共 14 条

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