Effects of heat treatment on electric properties of nanorods formed by electron beam-induced deposition

被引:0
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作者
Shimojo, Masayuki [1 ,2 ]
Takeguchi, Masaki [1 ]
Che, Renchao [1 ]
Zhang, Wei [1 ]
Tanaka, Miyoko [1 ]
Mitsuishi, Kazutaka [1 ]
Furuya, Kazuo [1 ]
机构
[1] High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
[2] Advanced Science Research Laboratory, Saitama Institute of Technology, 1690 Fusaiji, Okabe, Saitama 369-0293, Japan
来源
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 6 B期
关键词
Nanometer-sized rods were fabricated by an electron beam-induced deposition technique with iron pentacarbonyl. The electric properties of the as-deposited and heat-treated nanorods were measured in situ using a transmission electron microscope. The obtained current-voltage curve showed a nonlinear characteristic; and the resistivity was in the order of 10-2 Ω m in the case of the as-deposited nanorods. After a heat treatment at 600°C in vacuum; the nanorods transformed to α-Fe; and a resistivity of approximately 10-6Οm and a metallic characteristic were obtained. This suggests that position- and shape-controlled metallic nanowires can be formed by electron beam-induced deposition combined with heat treatment. ©2006 The Japan Society of Applied Physics;
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页码:5509 / 5512
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