Synthesis and characterization of magnetron sputtered V-Al-Ta-N coatings

被引：0

作者：

Pei, Wang ^{[1
,2
]}

Zhu, Ping ^{[2
]}

Duan, Jinhui ^{[1
,2
]}

Liang, Yin ^{[1
,2
]}

Huang, Feng ^{[2
]}

Liu, Jianxiong ^{[1
]}

机构：

[1] School of Materials Science and Engineering, Kunming University of Science and Technology, Kunming

[2] Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Science, Ningbo

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2015年 / 35卷 / 06期

关键词：

Magnetron sputtering; Mechanical property; Microstructure; Tri bological performance; V-Al-Ta-Ncoating;

D O I：

10.13922/j.cnki.cjovst.2015.06.14

中图分类号：

学科分类号：

摘要：

The quaternary (VAl) 1-xTaxNcoatings were deposited by react ive magnetron co-sputtering on substrate of Corning Eagle glass. The impact of the growth conditions, including but not limited to the Ta-doping, sputtering power, substrate temperature and ratio of Ar/N2 flow rates, on the microstructur es and mechanical properties of the coatings were investigated with X-ray diffraction, scanning electron microscopy, atomic force microscopy and conventional mechanical probes. The results show that the Ta-content significa ntly affects the mechanical properties of the <200> preferentially oriented coatings. For instance, as the Ta-content increased from below x≤0.31 to above x≥0.57, the dominated (111) preferentially oriented cubic VN turned completely into <200> oriented cubic TaN, accompanied by significantly increasing hardn ess, modulus, toughness, and compactness, but strongly decreasing wear-resistance and friction coefficient. Possible mechanisms responsible for the changes in its mechanical and tribological behavior were also tentatively discussed. ©, 2015, Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology. All right reserved.

引用

页码：719 / 725

页数：6

共 30 条

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