Low-dielectric-constant nonporous fluorocarbon films for interlayer dielectric

被引：0

作者：

Itoh, Azumi ^{[1
,2
]}

Inokuchi, Atsutoshi ^{[1
,3
]}

Yasuda, Seiji ^{[1
]}

Teramoto, Akinobu ^{[1
]}

Goto, Tetsuya ^{[1
]}

Hirayama, Masaki ^{[1
]}

Ohmi, Tadahiro ^{[1
]}

机构：

[1] New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

[2] Zeon Corporation, Kawasaki 210-9507, Japan

[3] Tokyo Electron Ltd., Nirasaki, Yamanashi 470-0192, Japan

来源：

Japanese Journal of Applied Physics | 2008年 / 47卷 / 4 PART 2期

关键词：

Gases;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：2515 / 2520

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