Design and analysis of a novel xy micro-positioning stage used corrugated flexure beams

This paper presents the design and analysis of a novel XY micro-positioning stage which is driven by noncontact force provided by electromagnetic actuators. The stage is constructed with eight pieces of flexure structure, the corrugated flexure beam (CF beam), which have a large range of motion. Through the empirical equations, a set of optimized parameters of CF beam are decided. Then the static and modal analysis of the stage are conducted by finite element analysis(FEA) via Workbench, which validate the characteristic of large range of motion and work out its stiffness and natural frequency. The relationship between the displacement of the proposed micro-positioning stage and the exciting current is discussed. © Springer International Publishing Switzerland 2014.