Design and calibration of Isara 400" ultra-precision CMM"

被引：5

作者：

Spaan H. ^{[1
]}

Widdershoven I. ^{[1
]}

Donker R. ^{[1
]}

机构：

[1] IBS Precision Engineering, Esp 201, 5633AD, Eindhoven

来源：

Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2011年 / 19卷 / 09期

关键词：

Calibration; Coordinate Measuring Machine(CMM); Nanotechnology; Touch probe;

D O I：

10.3788/OPE.20111909.2236

中图分类号：

学科分类号：

摘要：

This paper presents critical aspects of the calibration of the Isara 400 ultra-precision 3D Coordinat Measuring Machine(CMM), such as the calibration of flatness and out-of-squareness of the system's mirror table. In addition, a newly developed ultra-precision tactile probe system is described and the results of the 3D sensitivity calibration of this probe are presented.

引用

页码：2236 / 2241

页数：5

共 4 条

[1] Donker R.L., Widdershoven I., Spaan H.A.M., Isara 400: Enabling ultra-precision coordinate metrology of large parts, Proceedings of the 10th International Euspen Conference, (2010)
[2] Ruijl T.A.M., Ultra precision coordinate measuring machine - Design, calibration and error compensation, (2001)
[3] Evans C.J., Smith C., Soobitsky J., Et al., Full area calibration of large optical flats, Proceedings of the ASPE Spring Topical Conference, (2009)
[4] Henny A.M., Rilpho L., Widdershoven I., Isara 400: Development of an ultra-precision CMM for 3D measurement of large parts, Proceedings of the ASPE Spring Topical Conference, (2009)

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