Sliding mode control with frequency shaped hyperplane for ball screw driving stage

被引：0
作者：
Hakoda, Fumihiko [1 ]
Sone, Yasuhiro [1 ]
Yamauchi, Atsushi [1 ]
Nonami, Kenzo [1 ]
机构：
[1] Nikon Corporation, Shinagawa-ku, Tokyo, 140-8601
来源：
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 2007年 / 73卷 / 04期
关键词：
Ball screw driving; H-infinity control; Sliding mode control; X-Y stage;
D O I：
10.1299/kikaic.73.1119
中图分类号：
学科分类号：
摘要：
In CNC Video Measuring System, very low speed motion is needed as well as high speed motion. Very low speed motion is highly influenced by friction. Currently, we use the PID Control with Lookup table gain to cope with this problem. However the process of developing this table tends to be a trial-and-error one. In this paper, we tried the Model-Based Controller Design. First, we made the model for control system design to use subspace method which is one of the algorithm in System Identificatin technique. Then, we designed the sliding mode controller with frequency shaped hyperplane and applied it to the real machine. Now we have achieved both the strong attenuation of disturbance in low frequency and the stability in high frequency using this technique.
引用
收藏
页码：1119 / 1126
页数：7
相关论文
共 8 条
  • [1] Mashimo T., Et al., High Speed Positioning Method for Serve Motor Considering Friction Load Torque, Trans. of Institute of Electrical Engineers of Japan, 124, 7, pp. 666-673, (2004)
  • [2] Takagi S., Et al., Velocity Control for a Mechanical System with Nonlinear Friction Using Friction Estimation, Transactions of the Japan Society of Mechanical Engineers, 69, 682, pp. 1522-1528, (2003)
  • [3] Nonami K., Et al., Control System Design Using, (1998)
  • [4] Young K.D., Ozuguner U., Frequency Shaping Compensator Design for Sliding Mode Control, Int. J. Control, 57, 5, pp. 1005-1019, (1993)
  • [5] Ito T., Nonami K., Application of Sliding Mode Control with Robust Hyperplane to Flexible Structure, Transactions of the Japan Society of Mechanical Engineers, 65, 629, pp. 161-166, (1999)
  • [6] Xu Y., Nonami K., A Fuzzy Modeling of Active Magnetic Bearing System and Sliding Mode Control with Robust Hyberplane Using μ-Synthesis Theory, Transactions of the Japan Society of Mechanical Engineers, 68, 666, pp. 398-405, (2002)
  • [7] Hirasawa S., Nonami K., Sliding Mode Positioning Control of Single Link Flexible Arm Using H<sub>∞</sub> Control Hyperplane with Q Parametrization, Transactions of the Japan Society of Mechanical Engineers, 64, 619, pp. 918-924, (1998)
  • [8] Adachi S., System Identification for Control Using, (1996)
1