Thermal stability of sputtered Cu films with nanoscale growth twins

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作者
Anderoglu, O. [1 ]
Misra, A. [2 ]
Wang, H. [3 ]
Zhang, X. [1 ]
机构
[1] Department of Mechanical Engineering, Texas A and M University, College Station, TX 77843-3123, United States
[2] Center for Integrated Nanotechnologies, Los Alamos National Laboratory, Mailstop G755, Los Alamos, NM 87545, United States
[3] Department of Electrical Engineering, Texas A and M University, College Station, TX 77843-3128, United States
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Journal of Applied Physics | 2008年 / 103卷 / 09期
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