Impact of high-k HfO2 dielectric on the low-frequency noise behaviors in amorphous ingazno thin film transistors

被引:0
|
作者
Semiconductor Laboratory, Samsung Advanced Institute of Technology, Yongin, Gyeonggi 446-712, Korea, Republic of [1 ]
不详 [2 ]
不详 [3 ]
不详 [4 ]
机构
来源
Jpn. J. Appl. Phys. | / 10卷 / 1002051-1002053期
关键词
Compendex;
D O I
暂无
中图分类号
学科分类号
摘要
Thin films
引用
收藏
相关论文
共 50 条
  • [1] Impact of High-k HfO2 Dielectric on the Low-Frequency Noise Behaviors in Amorphous InGaZnO Thin Film Transistors
    Park, Jae Chul
    Kim, Sun Il
    Kim, Chang Jung
    Kim, Sungchul
    Kim, Dae Hwan
    Cho, In-Tak
    Kwon, Hyuck-In
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (10) : 1002051 - 1002053
  • [2] Comparative Study of ZrO2 and HfO2 as a High-k Dielectric for Amorphous InGaZnO Thin Film Transistors
    Park, Jae Chul
    Cho, In-Tak
    Cho, Eou-Sik
    Kim, Dae Hwan
    Jeong, Chan-Yong
    Kwon, Hyuck-In
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2014, 9 (01) : 67 - 70
  • [3] The electrical performance and gate bias stability of an amorphous InGaZnO thin-film transistor with HfO2 high-k dielectrics
    Wang, Ruo Zheng
    Wu, Sheng Li
    Li, Xin Yu
    Zhang, Jin Tao
    SOLID-STATE ELECTRONICS, 2017, 133 : 6 - 9
  • [4] Low-Voltage a-InGaZnO Thin-Film Transistors With Anodized Thin HfO2 Gate Dielectric
    Shao, Yang
    Xiao, Xiang
    He, Xin
    Deng, Wei
    Zhang, Shengdong
    IEEE ELECTRON DEVICE LETTERS, 2015, 36 (06) : 573 - 575
  • [5] Amorphous InGaZnO thin film transistors with SiO2/HfO2 double-layer gate dielectric fabricated at low temperature
    Kim, Ji-Hong
    Kim, Jae-Won
    Roh, Ji-Hyung
    Lee, Kyung-Ju
    Do, Kang-Min
    Shin, Ju-Hong
    Koo, Sang-Mo
    Moon, Byung-Moo
    MATERIALS RESEARCH BULLETIN, 2012, 47 (10) : 2923 - 2926
  • [6] Low-temperature fabrication of sputtered high-k HfO2 gate dielectric for flexible a-IGZO thin film transistors
    Yao, Rihui
    Zheng, Zeke
    Xiong, Mei
    Zhang, Xiaochen
    Li, Xiaoqing
    Ning, Honglong
    Fang, Zhiqiang
    Xie, Weiguang
    Lu, Xubing
    Peng, Junbiao
    APPLIED PHYSICS LETTERS, 2018, 112 (10)
  • [7] Relation Between Low-Frequency Noise and Subgap Density of States in Amorphous InGaZnO Thin-Film Transistors
    Kim, Sungchul
    Jeon, Yongwoo
    Lee, Je-Hun
    Ahn, Byung Du
    Park, Sei Yong
    Park, Jun-Hyun
    Kim, Joo Han
    Park, Jaewoo
    Kim, Dong Myong
    Kim, Dae Hwan
    IEEE ELECTRON DEVICE LETTERS, 2010, 31 (11) : 1236 - 1238
  • [8] Low-frequency noise study of nMOSFETs with HfO2 gate dielectric
    Simoen, E
    Mercha, A
    Pantisano, L
    Claeys, C
    Young, E
    PHYSICS AND TECHNOLOGY OF HIGH-K GATE DIELECTRICS II, 2004, 2003 (22): : 319 - 331
  • [9] A comparative study of amorphous InGaZnO thin-film transistors with HfOxNy and HfO2 gate dielectrics
    Zou, Xiao
    Fang, Guojia
    Yuan, Longyan
    Tong, Xingsheng
    Zhao, Xingzhong
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2010, 25 (05)
  • [10] High-Performance Inkjet Printed Carbon Nanotube Thin Film Transistors with High-k HfO2 Dielectric on Plastic Substrate
    Lee, Chun Wei
    Pillai, Suresh Kumar Raman
    Luan, Xuena
    Wang, Yilei
    Li, Chang Ming
    Chan-Park, Mary B.
    SMALL, 2012, 8 (19) : 2941 - 2947