Observation of characteristics of magnetic neutral loop discharge plasma appearing at antenna in RF circuit

被引：0
|
作者：
Tsuboi, Hideo [1 ]
Ogata, Seiji [1 ]
机构：
[1] ULVAC, Inc., 2500 Hagizono, Chigasaki, Kanagawa 253-8543, Japan
来源：
| 1600年 / Japan Society of Applied Physics, 1-12-3 Kudan-Kita,k Chiyoda-ku, Tokyo, 102, Japan卷 / 46期
关键词：
Electric discharges;
D O I：
暂无
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学科分类号：
摘要：
Journal article (JA)
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