Integrated active magnetic probe in silicon-on-insulator complementary metal-oxide-semiconductor technology

被引：0

作者：

Aoyama, Satoshi ^{[1
,2
]}

Kawahito, Shoji ^{[1
,2
]}

Yamaguchi, Masahiro ^{[1
,3
]}

机构：

[1] Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

[2] Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

[3] Graduate School of Engineering, Tohoku University, 6-6-05 Aramaki-aza-Aoba, Aoba-ku, Sendai 980-8579, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 9 A期

关键词：

Silicon on insulator technology;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：6878 / 6883