The study on the optimizational technology of the large area free-standing diamond films' mechanical polishing

被引：0
|
作者：
Guo, Shi-Bin [1 ]
Qu, Yang [2 ]
Lu, Fan-Xiu [1 ]
Tang, Wei-Zhong [1 ]
Tong, Yu-Mei [1 ]
Song, Jian-Hua [1 ]
机构：
[1] Function Material Institute, Department of Material Science and Technology, University of Science and Technology Beijing, Beijing 100083, China
[2] Shenyang Kejing Instrument Co. LTD., Shenyang 110168, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2007年 / 38卷 / 07期
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页码：1173 / 1175
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