Fabrication of nanoparticles by electron-beam-induced dewetting from thin Au film

被引：0
|
作者：
Kojima, Yasuhiko [1 ]
Arae, Takuto [1 ]
Kato, Takahisa [1 ]
Nosaka, Masataka [1 ]
机构：
[1] Engineering Section, ELIONIX INC., 3-7-6 Motoyokoyama-cho, Hachiouji-shi, Tokyo, 192-0063, Japan
来源：
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 2009年 / 75卷 / 750期
关键词：
D O I：
10.1299/kikaic.75.484
中图分类号：
学科分类号：
摘要：
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页码：484 / 490
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