Replication of polymer microstructure using thermal-assisted ultrasonic embossing

被引:0
|
作者
Luo, Yi [1 ]
Yan, Xu [1 ]
Chen, Li [1 ]
Wang, Xiao-Dong [1 ]
机构
[1] Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116023, China
来源
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2014年 / 22卷 / 05期
关键词
13;
D O I
10.3788/OPE.20142205.1220
中图分类号
学科分类号
摘要
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页码:1220 / 1226
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